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5kW Cylindrical Chamber Microwave Plasma CVD System

5kW Cylindrical Chamber Microwave Plasma CVD System

Product Description PECVD system technique is to make the traditional chemical vapour deposition (CVD) reaction temperature is reduced, most ordinary CVD equipment...
  • LD
  • 5kW Cylindrical Chamber Microwave Plasma CVD System
  • US $10,000 - 20,000/ Set | Get Latest Price
  • Standard Export Woodencase Suitable for Ocean Carriage
  • Within 15 or 45 working days after receiveing the deposit
  • 30% as deposit in advance,70% should be paid before shipment.
  • 100 Set/Sets per Month
  • Shandong, China (Mainland)
  • ISO 9001, CE Certificate
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Tel : +86 0531 85064682

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Address:Beiyuan, Tianqiao District, Jinan, Shandong, China

Product Description

Product Description

PECVD system technique is to make the traditional chemical vapour deposition (CVD) reaction temperature is reduced, most ordinary CVD equipment temperature at 900 ℃ or so, and, in the front of the ordinary CVD device to join the RF radio frequency induction device reaction gas ionization, plasma formation, the activity of plasma is used to promote the reaction, can make chemical vapor deposition temperature down to about 400 ℃, so the system known as the enhanced chemical vapor deposition (PECVD) technique of the system.

Technical Parameters Furnace Parts
1 Chamber model Open slidable chamber 2 Display model 7 "touch screen
3 Max temperature 1200℃ 4 Working temperature ≤1150℃
5 Heating rate Suggess:10℃/Min Max:30℃/Min 6 Chamber move Yes,speed is adjustable
7 Heating zone length 200mm 8 Tube size 60*1150 mm
9 Temperature accuracy ±1℃ 10 Sealing way Rapid flange seal
11
Temperature curve 30 segments programmable 12 Persisting curve 15 curve
13 over heat alarm have 14 overcurrent protection have
15 Thermocouple Failure Protection have
16 Temperature measure element K-type thermocouple
17 Hearth Material Imported alumina fiber 18 Overall dimensions 1500*600*1000MM
Technical Parameters RF power
1. Signal frequency 13.56 MHz±0.005% 2. outout 5W-300W
3 Power stability ±0.1% 4 efficiency >=70%
5 Power factor >=90% 6 Cooling way Forced air cooling
Technical Parameters Vacuum part
1 power 500W 2 Extraction rate 2L\s
3 Ultimate vacuum 4*10-2 Pa
Technical Parameters Pneumatic system
1 1 ~ 3 road mass flowmeter is optional 2
accuracy:±1.5%
3 Repeat accuracy:±0.2% 4. Operating differential pressure range:0.1~0.5 MPa
The whole machine system characteristics
1 Positive pressure measurement -100Kpa---100Kpa 2 Vacuum measurement 10-2 Pa ~100Kpa(Support Ar measurement)
3 Positive pressure protection support 4 Pressure constant support
5 Intelligent gas path support 6 Gas circuit timing support
7 RF working time setting support 8 Movement speed adjustment support
9 highest vacuum 4.8×10-3 Pa 10 Software functions 1: rf power open time, can be set, time to stop automatically after the radio frequency power supply.
2: automatic gas switch function, different temperature in different gases, or according to your requirements (optional)
3: automatic detection of vacuum degree, according to the size of the vacuum degree, automatic startup radio frequency power supply.
4: vacuum pump automatic start, according to the degree of vacuum, the system automatically determine whether need to start the vacuum pump.
5. The overpressure protection.
6: other functions according to your requirements

FOB 18000 /USD
Choose a different RF power, vacuum requirements, the number of air and software functions are not the same price,

Main Features

1、In-line vacuum automatic balance-----The tube vacuum real-time monitoring, automatic balance.PECVD process requirement quartz tube vacuum technique is usually between 0.1 ~ 100 pa, the type of PECVD of AIO technique will stop automatically by the vacuum pump control system of tube vacuum degree, set by the user to maintain the uniformity of film forming effect of the best.
2、AIO heating control-----plasma radio frequency control, control system, gas flow control, vacuum system control has focused on a 7-inch touch screen for centralized regulation and control, coordination control - ChengYi AIO control system;
3、The intelligent gas path fault ----- each gas can timing on and off, free switch, save time and effort;
4、The timing control-----set in advance good power of the rf power and the size of the open and close time, automatically run;
5、The chamber movement speed is adjustable-----according to the experimental requirements, the user can set furnace about moving speed can be distance, at the end of the sedimentation chamber of a stove or furnace can be automatically removed sedimentary area and make samples fast cooling;
6、The whole machine structure integration-----overall length is only 1.5 meters, mobile convenience, avoid scattered assembly.
Detailed Images

Machine Parts

Name: Tube furnace

Brand: Chengyi

Original: China

The latest models PECVD for ChengYi technique, combining the most domestic manufacturers of tubular PECVD system technique,

Main Features

the advantages of touch screen on a key control, the experiments prove that this structure sedimentation speed, film quality is good, pinhole is less, not easy to crack

Machine Parts

And the control part adopts ChengYi independent research and development of the experimental furnace AIO automatic intelligent control system


Main Features


make the operation more convenient, more powerful.

Certifications Our Service

Pre-Sales Service

* Inquiry and consulting support.

* Sample testing support.

* View our Factory.

After-Sales Service

* Training how to instal the machine, training how to use the machine.

* Engineers available to service machinery overseas.

Packing & Delivery


1.by courier, like DHL,UPS,FEDEX,etc.usually,3-4 days to arrive.
2.by air to the air port,usually5-7 days to arrive.
3.by sea to sea port,ususally,15-30 days to arrive.
if you delivery time is very urgent, we suggest you choose by courier or by air.
if it not very urgent,we will suggest you choose by sea,it is very cheap


Our Company

Henan Chengyi Equipment Science an Technology Ltd. is a manufacturer devoted into the research, development and produce of lab furnace and industrial furnace.
In 2009, begin to produce furnaces for university research institutes and military testing departments.
In 2013, establish the project of designing industrial continuous production furnaces.
In 2014, Henan Chengyi Laboratory Equipment Ltd. is established, aiming at the developing and sales of lab furnace.
In 2015, Henan Chengyi Equipment Science and Technology Ltd. is established to develop high technology lab furnace and industrial furnace.
In 2016, Chengyi actively exploring overseas market and got the import & export right. Chengyi Brand is praised by customers all around the world.

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FAQ

1.Paymen
We accept LC,T/T , Western Union or other agreed payment method
2.Delivery
Normally we will deliver the goods within 3-5 days.
if you need to customize, we will need 30-40 days to finish.
3.Shipment
We could supply the service of the shipment from booking container to gate-yo-gate
transportion.
4.Designs
OEM designs are welcomed.You can send your own design of equipment and LOGO,we can
open new mold and print or emboss any LOGO for you.
5.Warranty
we pack the goods in wooden cases in from.strong packing ensure shipment safety of lab
furnace.We provide technical support and quality guarantee for each user by 24 hours
after-sale service everyday.

6.Other question
Please email me or contact me about details.
Tel: 86-0371-55027794
Fax: 86-0371-55027786
Whats:+8613071020069



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